| Parameter | Glass Wafer Standard Specification |
| Material | Glass, Fused Silica etc. |
| Diameter | 4”, 6”, 8”, 12” etc. |
| Diameter Tolerance | +/-0.01mm |
| Mini. THK. | 0.2mm(< 6”), 0.3mm(8”), 0.35mm(12”) |
| TTV | <1μm |
| BOW | <20μm |
| WARP | <30μm |
| Surface Quality | 20-10 |
| Roughness | Ra<0.2nm |
| Chamfer | 45°, C0.2+/-0.1mm |
| Coating | AR film, Reflection film, Splitter film etc. |
* Remark：Customized is available | |
